01
02
4156A precision semiconductor parameter analyzer with a 6" point probe station
03
Vacuum probe station & gas sensor characterization system M5VC
04
MST-1000B temperature controller
05
SR570 low-noise amplifier
06
Agilent 89441 vector-signal analyzer
07
Agilent 4284 precision LCR meter
08
Solartron 1260A impedance/gain-phase analyzer, solartron 1296A dielectric interface
09
Agilent 8110A 150MHz pulse generator
10
Femto DHPCA-100 variable-gain high speed current amplifier
11
Signal recovery 5210 & SR830 lock-in amplifiers
12
Labview equipped data acquisition computers
13
In-house hall measurement system
14
Daeil optical table
15
High power He-Ne laser & optical components
16
Boonton 7200 capacitance meter
17
R/G/B/IR/UV LED
18
Optical microscope
19
Atomic force microscopy
20
Workstation for TCAD simulation
01
RF/DC magnetron sputtering system (1)
02
RF/DC magnetron sputtering system (2)
03
Thermal evaporator
04
Atomic layer deposition (ALD) system (1)
05
Atomic layer deposition (ALD) system (2)
06
Mask aligner, chemical fume hood, spin coater, hot plate
07
Rapid thermal annealing (RTA) system
08
Vacuum furnace
09
Heat treatment system
10
Plasma treatment system
11
UV-ozone cleaner
12
Glove box & equipments for solution processing
13